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DIN EN ISO 25178-606
Geometrical product specification (GPS) - Surface texture: Areal - Part 606: Nominal characteristics of non-contact (focus variation) instruments (ISO 25178-606:2015); German version EN ISO 25178-606:2015
DIN EN ISO 25178-604
Geometrical product specification (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013); German version EN ISO 25178-604:2013
DIN EN ISO 25178-605
Geometrical product specifications (GPS) - Surface texture: Areal - Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments (ISO 25178-605:2014); German version EN ISO 25178-605:2014
DIN EN ISO 25178-602
Geometrical product specifications (GPS) - Surface texture: Areal - Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments (ISO 25178-602:2010); German version EN ISO 25178-602:2010
DIN EN ISO 25178-603
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013); German version EN ISO 25178-603:2013
DIN EN ISO 25178-601
Geometrical product specifications (GPS) - Surface texture: Areal - Part 601: Nominal characteristics of contact (stylus) instruments (ISO 25178-601:2010); German version EN ISO 25178-601:2010
DIN EN ISO 25178-73
Geometrical product specifications (GPS) - Surface texture: Areal - Part 73: Terms and definitions for surface defects on material measures (ISO 25178-73:2019); German version EN ISO 25178-73:2019
DIN EN ISO 25178-600
Geometrical product specifications (GPS) - Surface texture: Areal - Part 600: Metrological characteristics for areal-topography measuring methods (ISO 25178-600:2019); German version EN ISO 25178-600:2019
DIN EN ISO 25178-71
Geometrical product specifications (GPS) - Surface texture: Areal - Part 71: Software measurement standards (ISO 25178-71:2017); German version EN ISO 25178-71:2017
DIN EN ISO 25178-72
Geometrical product specifications (GPS) - Surface texture: Areal - Part 72: XML file format x3p (ISO 25178-72:2017 + Amd 1:2020); German version EN ISO 25178-72:2017 + A1:2020